Nordson MARCH’s new FlexTRAK™-WF plasma treatment system is a cassette-based automated plasma treatment system that handles five wafer sizes with minimal hardware change-over. An integrated robot and aligner automate the processing of a wide variety of wafers and other flat substrates. The system offers high throughput, ranging up to 50 wafers per hour, while maintaining superior plasma uniformity for ashing, etching, and descum for wafer level packaging and general wafer-based processing applications.
Plasma System for Low-Cost, High Performance Wafer Processing
