Air Innovations’ ability to address demanding specifications was recently showcased when a global supplier to the semiconductor and photomask-making industries outlined the need for an environmental control unit that could service any of its nanomachining mask repair tool systems on demand.
Sophisticated and intricate masks are used in the manufacture of all integrated circuits. The mask is cut to provide the precise pattern through which a laser is beamed to create the exact pattern of the required circuit onto wafer chips that are used in all manner of electronic devices. Over time, masks become hazy and need repair and cleaning.
The tool that performs this function requires precise environmental conditions in order to operate at optimal levels. The Air Innovations solution involved configuring a standard, vertical ECU to match up to the client’s various types of mask repair products. The complex unit is a stainless steel system capable of controlling temperature to +/- 0.04°C and humidity to within +/- 1 percent. Air flow is adjustable from 600 to 1,350 standard cubic feet per minute.
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